0010‑23716 AMAT DCS Process Control Actuator

• Brand
  AMAT
• Model
  0010‑23716
• Product Name
  High Precision Process Control Actuator / Gas Valve Drive Component
• Place of Origin
  United States
• HS Code
  8538900000
• Dimensions
  185mm×120mm×35mm
• Weight
  0.85 kg
• Operating Temperature
  -20 °C to +80 °C
• Storage Temperature
  -30 °C to +85 °C
• Power Supply
  24 VDC
• Warranty
  12 month
• Product Status
  New and original

AMAT 0010-23716 Input and Output Specifications

Input Specifications

This AMAT precision actuator module supports configurable analog input signals for semiconductor process control. It accepts standard industrial voltage signals of ±10 VDC and current signals of 4–20 mA, covering common process sensor feedback signals for pressure, flow and vacuum monitoring. It adopts high-precision signal sampling with built-in noise filtering, effectively stabilizing weak field input signals in vacuum and corrosive working environments. The module also receives upper-system digital control commands to execute valve switching and flow adjustment actions, with complete over-range and short-circuit fault diagnosis for all input loops.

Output Specifications

The module provides isolated analog output signals and physical driving output for field process valves. It outputs configurable ±10 VDC voltage and 4–20 mA current signals to precisely adjust gas valve opening and vacuum loop flow. Featuring millisecond-level fast response output capability, it ensures real-time matching of semiconductor process parameters. In addition to analog output, it feeds back real-time operating status, fault codes and valve position data to the upper control system through digital communication output, realizing closed-loop process control and equipment status monitoring.