LVF3527A MKS LVF‑Series Solid‑State RF Plasma Generator new

• Brand
  MKS
• Model
  LVF3527A
• Product Name
  LVF‑Series 27 MHz 3500 W Solid‑State RF Plasma Generator
• Place of Origin
  United States
• Customs HS Code
  8543709990
• Power Supply
  200‑240 VAC
• Dimensions
  483 mm × 133 mm × 546 mm
• Weight
  31.8 kg
• Operating Temperature
  10 °C to +40 °C
• Storage Temperature
  -20 °C to +70 °C
• Warranty
  12 month
• Product Status
  new and original

MKS LVF3527A I/O Specifications

Model: LVF3527A (27 MHz, 3500 W RF Generator)

Power Input

AC Main Input: 208 V three-phase, 50–60 Hz, maximum nominal current 30 A

DC Auxiliary Input: Internal auxiliary power sourced from three-phase main power supply

Cooling Water Input: Deionized circulating cooling water; nominal flow rate of 7.5 L/min (2 Gal/min); inlet temperature range: 5 °C–35 °C; maximum inlet pressure: 414 kPa (60 PSI)

Control Signal Inputs

Analog Set-point Input: 0–10 VDC analog signal, corresponding to 0–100% full-scale RF power output (0–3500 W)

Digital Discrete Inputs: TTL/24 V compatible dry contact signals, including RF enable, interlock inhibit, local/remote mode selection, and fault reset

Communication Interface Input: RS-232 serial port for upper host command reception; supports optional parallel digital control interface

RF Sense Feedback Input: High-frequency feedback signal from matching network, used for forward and reflected power sampling and real-time power regulation

 Output Signals

RF Power Output: Nominal operating frequency of 27 MHz, maximum forward RF power of 3500 W, 50 Ω standard impedance; transmits RF power to plasma load or matching box via coaxial connector

Analog Monitor Outputs: Isolated 0–10 VDC analog outputs for real-time monitoring of forward power, reflected power and DC operating voltage

Digital Status Outputs: Isolated open-collector and relay status outputs, including RF active, fault alarm, interlock trigger and device ready signals

Communication Output: RS-232 serial data output, uploading device operating status, measured data and fault codes

Cooling Water Output: Hot water return port for circulating cooling system

Protection & Interlock I/O

External Interlock Input: Hardwired hardware interlock signal, which immediately cuts off RF power once triggered

Internal Fault Outputs: Alarm signals for over-reflected power, over-temperature, cooling water flow loss and mains power failure faults

Digital Discrete Input Functions of MKS LVF3527A

The MKS LVF3527A RF generator is equipped with TTL/24 V dry-contact compatible digital discrete inputs, serving as hardware-level control terminals to implement direct logic control of the device. The specific functions of each discrete input are detailed as follows:

RF Enable

This is the primary hardware enable signal for RF power output. The generator can only generate RF power when this input is activated. Deactivating this signal during normal operation will immediately terminate the RF output. It acts as the core hardware permission signal for RF start and stop control, with higher priority than software commands.

Interlock Inhibit

A dedicated safety-grade hardware interlock input. Once triggered by an external safety chain signal, it forces an immediate shutdown of RF power output, overriding all software instructions and analog setpoint commands. This input is typically connected to safety loops such as chamber door interlocks and emergency stop signals. The generator will remain locked in a safe state and cannot restore RF output until the interlock fault condition is fully resolved.

Local-Remote Selection

This input is used to switch the device’s operating control mode. InRemote Mode, all control commands and power setpoints are issued by external PLCs, host controllers or serial communication systems, and local front-panel operation is restricted. In Local Mode, users control parameter configuration and RF start/stop functions via the device front panel, while external analog setpoints and remote control commands are disabled.

Fault Reset

This hardware trigger input is designed for fault state clearing. When the generator locks up due to faults including over-temperature, cooling water loss, excessive reflected power and mains power abnormality, a pulse signal on this input can reset the device fault status. After successful reset, the generator returns to standby mode and is available for RF enable operation again. Note that persistent hardware faults cannot be cleared simply by resetting; the root cause must be eliminated first.

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